Comparison between XPS and SIMS
- Practical Electron Microscopy and Database -
- An Online Book -

http://www.globalsino.com/EM/  



 

 

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  XPS Static SIMS TOF-SIMS Dynamic SIMS
 
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Lateral resolution
10 µm Down to below 100 nm 60 nm  
Depth probed
1-10 nm Outer 1 to 2 monolayers 1Å – 3 nm Depth resolution 2-30 nm, probe into µm below surface
Range of elements
All except H, He
All
Quantification
Excellent without standard
Standard Required
Mass range
  Typically up to 1000 amu 10000 amu  
Molecular Information
Functional group bonding   Some functional groups, Molecular weight, Polymer repeat unit, Unique mass fragments  
Chemical bonding
  Yes   In rare cases only
Detection Limit
0.1%  
ppb - ppm
Destructive
No Yes, if sputtered long enough   Yes, material removed during sputtering
Accuracy
      2 %
Imaging/mapping
      Yes
Sample requirements
Solid; vacuum compatible
Main application
  Surface chemical analysis, organics, polymers    

 

 

 

 

 

 

 

 

 

 

 

 

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