EELS Spatial Resolution Depending on Specimen Thickness  Practical Electron Microscopy and Database   An Online Book  

Microanalysis  EM Book http://www.globalsino.com/EM/  


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The spatial resolution of the EELS measurement in STEM mode can be estimated by the diameter of the probe irradiation on the specimen. Assuming the thickness of the specimen is t, then the spatial resolution is given by (see Figure 1307a):
For instance, Figure 1307b shows the spatial resolutions at convergence semiangles 7 and 15 mrad, respectively, based on Equation 1307. Note that such convergence semiangles are used in many TEM systems.


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