Brown and Ho  used an EELS spectrometer with an incident electron energy of 10 eV, consisting of a double-pass cylindrical monochromator and single-pass cylindrical analyzer, to analyze the interaction between methyl chloride and Si( 100) 2 x 1. Figure 2045 shows the EEL spectra obtained after 1 L exposures of methyl chloride (CH3CI) onto the Si(100) surface held at 85 and 300 K. The origin of the peaks, related to the existence of molecularly adsorbed species, is listed in Table 2045.
Figure 2045. The EEL spectra obtained after 1 L exposures of methyl chloride onto the Si(100) surface held at 85 and 300 K. 
Table 2045. The origin of the peaks in Figure 2045.
||The Si-Cl stretch: an adsorbed chlorine atom
||The C-Cl stretch of a
weakly bound methyl chloride molecule
||The Si-(CH3) stretch
||The CH3 symmetric deformation mode
||The CH3 asymmetric deformation mode
||The C-H stretch
 Kyle A. Brown and W. Ho, The interaction of methyl chloride and Si( 100) 2 x 1, Surface Science 338 (1995) 111-116.