Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| The quality of epitaxial layers is determined by many factors. For instance, the high temperatures in the highly corrosive environments associated with the precursors, and the lattice parameters of epitaxial layers and substrate should be taken into account in the selection of the substrate. On the other hand, it is also important to take into consideration the difference of the thermal expansions between the epilayers and the substrate because the growth happens at elevated temperatures.
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