This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
 

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There are different ways to prepare SEM samples for EBSD analyses. For instance, the samples can be ground with SiC papers, mechanically polished with diamond slurries and then are finely polished with 0.05 µm colloidal silica solution for one hour.

In EBSD analysis, specimen strains, surface roughness, and surface contamination can disturb and deteriorate the quality of the pattern formed at the detector. However, surface contamination can be removed by plasma cleaning and then the pattern quality is improved.