Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| Figure 2340 shows the schematic illustration of EBSD setup in a SEM system. The objective pole piece and EBSD detector of the system are indicated. In this case, approximately 70 steradian of pattern is detected. The working distance for EBSD is roughly between 8 and 45 mm.
Figure 2340. The schematic illustration of EBSD setup in a SEM system.
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