Chemical Vapor Deposition (CVD)
- Practical Electron Microscopy and Database -
- An Online Book -
This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
Table 2387. Comparison of different CVD techniques applied in microfabrication processes.
*Note: APCVD: atmospheric CVD; PECVD: plasma enhanced (assisted) CVD; LTLPCVD: low-temperature low-pressure CVD; MTLPCVD: medium temperature low pressure CVD; UHVCVD: ultrahigh vacuum CVD; AACVD: aerosol assisted CVD; DLICVD: direct liquid injection CVD; MPCVD: microwave plasma-assisted CVD; ALCVD: atomic-layer CVD.
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