Spatial Resolution in CBED Measurements
- Practical Electron Microscopy and Database -
- An Online Book -

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The spatial resolution of CBED measurements is determined by a couple of factors. Specimen thickness is one of the factors. For instance, if we have the experimental conditions below:
        i) A specimen is in thickness of 600 nm.
        ii) The incident electron spot size is ~1 nm.
        iii) The convergence angle of the incident electron is 10 mrad.
Then, the diameter of the electron at the bottom surface of the specimen will be about 10 nm. Therefore, the spatial resolution of the CBED measurements is about 10 nm in diameter.

 

 

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