Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Improvement of CBED Analysis by Energy Filter

In many cases, CBED analysis is improved by removing the inelastically scattered electrons by means of an electron energy filter. The energy filter can be set to a typical energy window of ~10 eV around the elastic peak. The energy filtering enhances HOLZ line contrast in CBED and enables us to study the HOLZ patterns from a thick specimen.