Practical Electron Microscopy and Database

In strain analysis with CBED technique, because of the elastic relaxation caused by the specimen thinning when the specimen is ≤ 100 nm, change of stress occurs after the specimen preparation, and then makes the analysis difficult. In many cases, CBED analysis is done by:
        i) Reducing the elastic relaxation using thick specimens (Between 300 and 600 nm).
        ii) Removing the inelastically scattered electrons by means of an electron energy filter. Thick TEM specimens give faded HOLZ patterns that make the analysis difficult because of inelastically scattered electrons in the specimen.