Chapter/Index: Introduction | A |
B |
C |
D |
E |
F |
G |
H |
I |
J |
K |
L |
M |
N |
O |
P |
Q |
R |
S |
T |
U |
V |
W |
X |
Y |
Z |
Appendix
Alkaline Hydroxide
| Table 2439. Etchants used in semiconductor manufacturing.
Film |
Etchant |
SiO2(Silicon oxide) |
Dilute hydrofluoric acid (DHF) |
Buffered HF (BHF) |
Polysilicon |
Alkaline hydroxide + organic |
Si3N4(silicon nitride)-selective to SiO2 |
Boiling phosphoric acid (H3PO4) |
Si3N4/SiO2 (non-selective) |
Hydrofluoric acid + organic |
|
