Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Taylor Cone

In FIB, the electrical field between tip and extractor electrode forms a conical surface that is so-called Taylor cone. Figure 2447a shows the Taylor cone shapes of the LMIS in various extractor fields, resulting in different ion beam currents. The emitter without electric field is shown in black. When the electric field approaches a critical value, a Taylor cone is formed (shown in gray in the tip). When the electric field is further increased, emission currents are obtained.

Taylor cone shapes of the LMIS in extractor fields

Figure 2447a. Taylor cone shapes of the LMIS in various extractor fields, resulting in ion beam currents of 0 (gray), 5, (blue), 10 (pink), and 20 µA(red), respectively.