Alloy Liquid Metal Ion Sources for Advanced FIBs
- Practical Electron Microscopy and Database -
- An Online Book -

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Many advanced applications of FIB have been based on alloy liquid metal ion sources (alloy-LMISs). The basic advantages of the alloys in such LMISs include:
         i) Low melting temperature.
         ii) High wetting characteristics of the surface of the needle.
         iii) High resistance to oxidation.

Table 2449 lists the materials for alloy liquid metal ion sources (LMISs).

Table 2449. Materials for alloy liquid metal ion sources.

Alloy
Melting Temperature (°C)
Applications
Reference
Au78.2Dy8Si13.8
294
Dy: magnetic moment
[2]
Au73Ge27
365
Au: Sputtering, nano-cluster; Ge: Doping, forming SixGe1-x microstructures
Au77Ge14Si9
365
Si: contamination free processing; low damage imaging
Co36Nd64
566
Co: CoSi2, Nd: optical and magnetic devices
Co27Ge73
817
Co: magnetic application
Er69Ni31
765
Er: optical application (optoelectronic integrated circuits - OEICs)
[1]
Er70Fe22Ni5Cr3
862
Fe,Ni,Cr: magnetic application
[4]
Sn74Pb26
183
Sn: doping
Mn45Ge54Si1
720
Mn: implantation in compound semiconductors
Ga38Bi62
222
Ga: acceptor; Bi: shallow donor
Ga35Bi60Li5
250
Li: source for analysis and ion beam lithography; low damage imaging
[3]
AlCeC
660
C implanation into III/V materials

[1] L. C. Chao and A. J. Steckl, Development of an Er–Ni liquid alloy ion source, J. Vac. Sci. Technol. B 17„3…, (1999) 1056.
[2] A. Melnikov, T. Gerya, M. Hillmann, I. Kamphausen, W. Oswald, P. Stauche, R. Wernhardt, and A.D. Wieck, Development of an Au–Dy–Si liquid alloy ion source for focussed ion beam implantation, Nuclear Instruments and Methods in Physics Research B 195 (2002) 422–425.
[3] L. Bischoff and Ch. Akhmadaliev, An alloy liquid metal ion source for lithium, J. Phys. D: Appl. Phys. 41(5) (2008) 052001.
[4] L. Bischoff and J. Teichert, Liquid metal ion source working with an Er70Fe22Ni5Cr3 alloy, (2000) J. Phys. D: Appl. Phys. 33 L69.

 

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