Ion Sources for FIB
- Practical Electron Microscopy and Database -
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Table 2450. Ion sources for FIB.

Type
Materials
Ions
Current
Percentage
LMIS (liquid Metal Ion Source)
Ga
Ga+
98%
Alloy -LMIS
CoNd, or AuGeSi
Au, Si, Ge, Co, Nd, Er…
2%
Laser Cooled Ion Source
Cs, …    
Ionic Liquid Ion Source
CsNO3
Cs+, NO3-
Gas Field Emission Ion Source
Noble gas, e.g. He/Ne
Low
He – FEIS (field emission ion sources)
He+
Low
Plasma Gas Ion Sources
Multicusp type
Noble gas (typically Xe at 100 pA – 1 uA)
High
Penning type
Magneto-Optical-Trap IS (ion sources)
Noble gas
Low
EBIT (electron beam ion trap)
Noble gas
Low
EBIS (electron beam ion source)
Noble gas
Low

 

 

 

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