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Table 2450. Ion sources for FIB.
Type |
Materials |
Ions |
Current |
Percentage |
LMIS (liquid Metal Ion Source) |
Ga |
Ga+ |
|
98% |
Alloy -LMIS |
CoNd, or AuGeSi |
Au, Si, Ge, Co, Nd, Er… |
|
2% |
Laser Cooled Ion Source |
Cs, … |
|
|
Ionic Liquid Ion Source |
CsNO3 |
Cs+, NO3- |
|
Gas Field Emission Ion Source |
Noble gas, e.g. He/Ne |
|
Low |
He – FEIS (field emission ion sources) |
|
He+ |
Low |
Plasma Gas Ion Sources |
Multicusp type |
Noble gas (typically Xe at 100 pA – 1 uA) |
|
High |
Penning type |
|
|
|
Magneto-Optical-Trap IS (ion sources) |
Noble gas |
|
Low |
EBIT (electron beam ion trap) |
Noble gas |
|
Low |
EBIS (electron beam ion source) |
Noble gas |
|
Low |
|
