Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Dependence of Ionic Sputtering on Ionic Energy

Figure 2451 shows the dependence of ionic sputtering yields on ion energies. The incident ions (Au, Nd, In, Ga, Co, Si, N, and Li) are normal to the silicon (Si) target surface.

The dependence of ionic sputtering yields on ion energies

Figure 2451. The dependence of ionic sputtering yields on ion energies. The target material is silicon.