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Dependence of Ionic Sputtering on Ionic Energy
- Practical Electron Microscopy and Database -
- An Online Book -
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https://www.globalsino.com/EM/
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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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Figure 2451 shows the dependence of ionic sputtering yields on ion energies. The incident ions (Au, Nd, In, Ga, Co, Si, N, and Li) are normal to the silicon (Si) target surface.
Figure 2451. The dependence of ionic sputtering yields on ion energies. The target material is silicon.
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The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.
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