Beam Blanking Deflector in EMs and FIB
- Practical Electron Microscopy and Database -
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The beam blanking deflectors in both EMs and FIB have similar functions. Table 2464 lists the function of each part in the FIB, including the beam blanking deflector.

Table 2464. The function of each part in the FIB.

Part
Function
LMIS
Ion source
Suppressor
Improves the distribution of extracted ions
Extractor
High tension used for ion extraction: Typical accelerating voltage in FIB systems ranges from 1 to 30 keV
Spray aperture
First refinement
1st lens (condenser lens)
Parallelize the ion beam: probe forming
Upper octopole
Stigmator
Beam defining aperture
Defines current: A set of apertures define the probe size and provides a range of ion currents (10 pA – 30 nA)
Blanking deflector
Beam blanking: Beam blankers are used to deflect the beam away from the centre of the column
Blanking aperture
Beam blanking
Lower octopole
Raster scanning
2nd lens (objective lens)
Beam focusing

 

 

 

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