This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
 

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Figure 2490 shows the schematic illustration of dual beam FIB/SEM. The angle (α) between the electron beam and ion beam is normally in the range of 52 and 54°. The description and operation principle of all the components in the system can be found in the online book.

Figure 2490. Schematic illustration of dual beam FIB/SEM.