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Quality of Epitaxial Layers
- Practical Electron Microscopy and Database -
- An Online Book -
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https://www.globalsino.com/EM/
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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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Table 2491 defines the quality of epitaxial layers grown on a substrate.
Table 2491. Quality of epitaxial layers grown on a substrate.
Epitaxial status |
Quality |
Random molecules |
Essentially amorphous structure with weak interlinking
between molecules, possibly with some ordering |
Amorphous extended lattice |
Similar strength interatomic bonds but no great length scale
correlation |
Nearly perfect polycrystalline |
Random orientated crystallites with similar size and shape |
Textured polycrystalline |
Crystallites preferentially orientated normal to the
surface, but randomly orientated in the plane with
a size distribution |
Textured epitaxial |
The layer orientation is close to registry with the
underlayer, both normal and parallel to the surface
plane. The layer is composed of mosaic blocks. |
Nearly perfect epitaxial |
A single extended crystal having near perfect registry
with the same orientation as the underlayer |
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The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.
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