This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
 

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Many important structural parameters of materials can modify semiconductor device performance. These parameters include:
        i) The micro-structures, such as crystalline and amorphous phases,
        ii) The dimensions of multilayers,
        iii) The imperfections,
        iv) The chemical compositions, e.g. dopants.