Automatic Qualitative EDS Analysis
- Practical Electron Microscopy and Database -
- An Online Book -

https://www.globalsino.com/EM/  



 

 

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Most modern computer-based EDS systems involve a routine for automatic qualitative analysis. The accuracy and convenience of such systems depend on several factors:
        i) Acquire an accurate spectrum.
        ii) Have a trustable, accurate, and convenient automated qualitative analysis procedure.
        iii) Have a look-up table, involving the complete x-ray families.
        iv) Correct the X-ray artifacts, such as the escape peaks and sum peaks, in the user interface (UI).

Furthermore, the automated system needs to be tested with known complex standards in order to understand the degree of confidence of the automatic quantification method on a particular EDS system.

 

 

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