Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| Grain size of polycrystalline materials can be measured by FIB. The contrast mechanism of those measurements is ion channeling through different crystallographic orientations in different grains. Therefore, in order to precisely determine the grain boundary locations, the measurements may be performed by tilting the specimen to several angles with respect to the incidence and then overlaying those images taken at the different angles.
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