Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| High-energy charged particles, e.g. incident electrons in electron microscopes (EMs) and Ga ions in focused ion beam (FIB), behave sometimes like particles, sometimes like waves. Even though those charged particles have both wave and particle properties, the information transfer properties of the lens can only be understood in the model of waves. Therefore, the EMs and FIB can only be described within the framework of wave optics.
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