Word Line (WL) Decoder of a DRAM Circuit
- Practical Electron Microscopy and Database -
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Figure 3850 shows the PVC (passive voltage contrast) in the contact level of WL (word line) decoder of a DRAM circuit. The p-contacts in n-well and n-/p- well contacts generate the brightest signal. P-contacts in n-well generate the brightest signal because of the forward bias in the pn-junction. The n-contacts in p-well generate the second brightest signal. The gate contacts generate dark signal because they are fully positively charged.

The PVC in contact level of WL (word line) decoder of a DRAM circuit

Figure 3850. The PVC in contact level of WL (word line) decoder of a DRAM circuit. Adapted from [1].

 

 

 

[1] Ruediger Rosenkranz, Failure localization with active and passive voltage contrast in FIB and SEM, J Mater Sci: Mater Electron (2011) 22:1523–1535.

 

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