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Low-energy Ar-ion milling, typically 500–900 eV, has been used to prepare ultrathin TEM specimens. [1] However, those specimens normally are thinned initially by FIB technique and/or high energy Ar-ion milling, e.g. 2–10 keV.

[1] Masanori Mitome, Ultrathin specimen preparation by a low-energy Ar-ion milling method, Journal of Electron Microscopy 0(0): 1–6 (2012).