Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Contamination Reduction in EM Vacuum

Contamination in EM vacuum systems can be reduced by cool-traps, by chemical purging, by using cleaner pumps, by plasma cleaning [1], or by liquid nitrogen-cooled anti-contamination device (ACD) [2].   [1] Vane R., Carlino V. Microscopy and microanalysis (2005) Honolulu, Abstract 233. [2] Vladár, A. E. et al. Proc. SPIE 4344 (2001), p. 835.