EELS Detection Limited by Radiation Damage
/Damage Cross Section in EELS Measurements
- Practical Electron Microscopy and Database -
- An Online Book -  


This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.



It was proposed [1] that the EELS ionization cross sections are within 5% for most K-edges and 15% for most L-edges, and the accuracy for other edges is significantly uncertain.

In some cases, the damage cross section d) is larger than the K-shel EELS ionization crossK) section, resulting in that the radiation damage prevents the detection of a single atom by K-shel EELS. If σd < σK, single atom detection is possible in principle.


[1] Egerton, R. F. (1993) Oscillator-strength parameterization of inner-shell cross sections. Ultramicroscopy 50, 13–28.



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