Secondary Ion Mass Spectrometry (SIMS)
- Practical Electron Microscopy and Database -
- An Online Book -

http://www.globalsino.com/EM/  



 

 

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Secondary ion mass spectrometry (SIMS) uses various ions for sputtering of sample surfaces. In SIMS, a primary beam of ions with energies typically between 10 and 20 keV is generated, accelerated and focused onto the surface of a target.

 

 

 

 

 

 

 

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