Temperature Increase/Heat Generation in FIB Deposition
- Practical Electron Microscopy and Database -
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The local rise of temperature during FIB deposition was experimentally investigated based on FIB fabricated thermocouple by Shukla et al [1]. They concluded that the temperature rise mostly varied from 50 to 330 °C, depending on the thermal conductivity of the substrate.


[1] Neeraj Shukla, Sarvesh K. Tripathi, Amit Banerjee, A. Sai Venkata Ramana, Nitul S. Rajput, Vishwas N. Kulkarni, Study of temperature rise during focused Ga ion beam irradiation using nanothermo-probe, Applied Surface Science 256 (2009) 475–479.



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