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Spatial Resolution Dependence on Overvoltages
- Practical Electron Microscopy and Database -
- An Online Book -
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https://www.globalsino.com/EM/
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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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In point analysis and mapping using EDS, some variation in the spatial resolution is expected with different X-ray lines and overvoltages [1].
[1] C. J. Powell, National Bureau of Standards Special Publication, 1976, 460, 97.
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