Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| Figure 4641 shows the escape depths of various species generated by high-energy electrons penetrating into a solid. Auger electrons and "soft" X-rays are emitted in depth of <1 nm and in diameter of beam size, secondary electrons are emitted in depth of < 10 nm and in diameter of beam size, and the emission depths and diameters of backscattered electrons and "hard" X-rays depend on both the beam energy and beam size.
Figure 4641. Escape depths of various species generated by high-energy electrons penetrating into a solid.
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