Background Variation due to
Thickness Variation in EELS and EFTEM
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The background due to zero and other energy loss may vary across the specimen due to local changes in composition and thickness. For instance, Figure 4720 shows that the background increases dramatically with increase of the thickness of TEM specimen, while the signal of Pt M4,5 edge decreases significantly. The highest signal in the range of these TEM specimen thicknesses for Pt occurs at 20 nm.

EELS of Pt M4,5 edg

Figure 4720. EELS of Pt M4,5 edge.