Contrast Dependence on Working Distance in SEM
- Practical Electron Microscopy and Database -
- An Online Book -

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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.

 

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The working distance is the distance between specimen and lower pole piece of scanning electron microscope (SEM). The SEM contrast strongly depends on the working distance. For instance, at short working distance, the major contribution to the signal collected using the lateral detector is that of SE3 electrons, which are backscattered by the pole piece as shown in Figure 4843. The corresponding contrast is a Z contrast.

Source of Secondary Electrons in SEM

Figure 4843. Source of Secondary Electrons in SEM. BS1 and BS2 are backscattering electrons; SE1 - SE4 are secondary electrons.

 

 

 

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