Comparison between hexagonal and C54

Comparison between Hexagonal and C54
- Practical Electron Microscopy and Database -
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The crystallographic cell of metal disilicides is represented in Figure 972, projected on the close-packed hexagonal plane. For C54, only a slight distortion makes the structure orthorhombic: the angle between the hexagonal axes is changed to 121° instead of 120°.

Two dimensional atomic arrangement in die stacking plane for the C54, C40 and C11b

Figure 972. Two dimensional atomic arrangement in die stacking plane for the C54, C40 and C11b. [1]

[1] A. Mouroux, Understanding the formation of TiSii in the presence of refractory metals for Si technology, Acta Univ. KTH (Stockholm, Sweden, 1999).

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