Electron microscopy
  
C54 Structure
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Schematic representation of plane stacking in the C11b structure

Figure 973a. Schematic representation of plane stacking in the C54 structure.

Two dimensional atomic arrangement in die stacking plane for the C54, C40 and C11b

Figure 973b. Two dimensional atomic arrangement in die stacking plane for the C54, C40 and C11b. [1]

 

 

 

 

 

 

 

[1] A. Mouroux, Understanding the formation of TiSii in the presence of refractory metals for Si technology, Acta Univ. KTH (Stockholm, Sweden, 1999).

 

 

 
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