Astigmatism Correction Coil Control System in SEMs
- Practical Electron Microscopy and Database -
- An Online Book -  


This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.



Figure 4226 shows an example of SEM systems. In all EMs (electron microscopes), the converged electron beam passes through the astigmatism correction coil, which is controlled by an astigmatism-correction coil control system, to control a beam shape.

Example of computer-controlled EMs: SEM system

Figure 4226. Example of computer-controlled EMs: SEM system.



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