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Astigmatism Correction Coil Control System in SEMs
- Practical Electron Microscopy and Database -
- An Online Book -
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https://www.globalsino.com/EM/
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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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Figure 4226 shows an example of SEM systems. In all EMs (electron microscopes), the converged electron beam passes through the astigmatism correction coil, which is controlled by an astigmatism-correction coil control system, to control a beam shape.
Figure 4226. Example of computer-controlled EMs: SEM system.
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