Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| Figure 5a shows the simulated throughput depending on defect size for E-beam inspection. The relationship between defect size and throughput is generally inverse, meaning smaller defect sizes typically result in lower throughput due to the increased inspection time required.
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