Electron microscopy
  
Electron Diffraction of Ytterbium Silicides
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Table 979. Electron diffraction of dysprosium silicides.

Ytterbium silicides Electron diffraction
YbSi2-x Orientation relationship of (10-10)YbSi2-x/(11-2)Si
Diffraction pattern along the [10-10]YbSi2-x/[11-2]Si direction of a cross-sectional YbSi2-x/(111)Si sample after annealing at 300 °C for 30 min. [1]
Orientation relationship of (10-10)YbSi2-x/(11-2)Si
Orientation relationship of (10-10)YbSi2-x/(11-2)Si from a sample after annealing at 300 °C for 30 min. [1]

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 


[1] Lih J. Chen, Silicide Technology for Integrated Circuits, 2004.

 

 

 
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