Electron microscopy
 
XRD of Palladium Silicides
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Table 983. XRD of palladium silicides.

Palladium silicides XRD profiles
  Overlapping [0001]Pd2Si/[111]Si XRD profile
XRD spectrum of Pd/(111)Si samples annealed at 875 °C. Adapted from [1] 
Pd2Si Overlapping [0001]Pd2Si/[111]Si XRD profile
Overlapping [0001]Pd2Si/[111]Si XRD profile. The sample was annealed at 800 °C for 1 h. Adapted from [1] 

 

 

 

 

 

 

 

 

 

 

 

[1] J.F. Chen, L.J. Chen, Transmission electron microscopy and X-ray diffraction investigation of phase formation and transition between Pd2Si and PdSi in Pd thin films on (1ll)Si, Materials Chemistry and Physics, 39 (1995) 229-235.

 

 

 

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