Electron microscopy
 
Electron Diffraction of Palladium Silicides
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Table 984. Electron diffraction of palladium silicides.

Palladium silicides Electron diffraction patterns
PdSi

[30-1] PdSi zone axis[30-1] PdSi zone axis
[30-1] PdSi zone axis from a Pd/(111)Si sample annealed at 875 °C for 1 h. Adapted from [1]

[2-3-1] PdSi zone axis[2-3-1] PdSi zone axis
[2-3-1] PdSi zone axis from a Pd/(111)Si sample annealed at 900 °C for 30~120 s. Adapted from [1]
Pd2Si Overlapping [0001]Pd2Si/[111]Si diffraction patternOverlapping [0001]Pd2Si/[111]Si diffraction pattern
Overlapping [0001]Pd2Si/[111]Si diffraction pattern, and the indexed pattern of the electron diffraction pattern. The sample was annealed at 800 °C for 1 h. Adapted from [1]

Overlapping [0001]Pd2Si/[111]Si diffraction patternOverlapping [0001]Pd2Si/[111]Si diffraction pattern
Overlapping [1-100]Pd2Si/[1-11]Si diffraction pattern, and the indexed pattern of the electron diffraction pattern. The sample was annealed at 900 °C for 1 h. Adapted from [1]

 

 

 

 

 

 

 

 

 

[1] J.F. Chen, L.J. Chen, Transmission electron microscopy and X-ray diffraction investigation of phase formation and transition between Pd2Si and PdSi in Pd thin films on (1ll)Si, Materials Chemistry and Physics, 39 (1995) 229-235.

 

 

 

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