Electron microscopy
 
Electron Diffraction of Nickel Silicides
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Table 986. Electron diffraction of nickel silicides.

Nickel silicides Electron diffraction patterns
NiSi2 NiSi
Micro-diffraction of NiSi2  [1]

NiSi2
NiSi2
Complicated reconstruction at NiSi2/Si(100) interface: (022) spots from both Si and NiSi2; (020) from NiSi2alone; (0, 1/2, 1/2) from superstructure(s) at the NiSi2/Si interface; diffuse spots or streaks for thick NiSi2 in Figure (a) are related to both (0, 1/2, 1/2) and (0, 1/2, -1/2), originating from domains related by a 90° rotation (a higher temperature and/or a longer time anneal leads to the appearance of discrete spots slightly displaced from the (0, 1/2, 1/2) and (0, 1/2, -1/2) positions). Arrows
point to positions equivalent to (0, 1/2, 1/2). [2]

 

 

 

 

 

 

 

 

 

 

 

[1] Lih J. Chen, Silicide Technology for Integrated Circuits, 2004.
[2] R. T. Tung, Epitaxial CoSi2 and NiSi2 thin films, Materials Chemistry and Physics, 32 (1992) 107-133.

 


 

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