Electron diffraction of titanium silicides

Electron Diffraction of Titanium Silicides
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Table 994. Electron diffraction of titanium silicides.

Titanium silicides	Electron diffraction
Ti₅Si₃	$Diffraction pattern of [110] Ti5Si3$ Diffraction pattern of [110] Ti₅Si₃, formed from a Ti/Si sample annealed at 450 °C for 2 h. [2]
TiSi₂	$A typical [100] selected area electron-diffraction pattern of a defective C49-TiSi structure along [100]axis.$ Typical [100] selected area electron-diffraction pattern of a defective C49-TiSi₂ structure along [100] axis [1]

[1] Z. Ma, L.H. Allen, Kinetic mechanisms of the C49-to-C54 polymorphic transformation in titanium disilicide thin films: A microstructure-scaled nucleation-mode transition, Phys. Rev. B, vol.49 (1994) p.13501–11.
[2] Lih J. Chen, Silicide Technology for Integrated Circuits, 2004.

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