Electron microscopy
 
Electron Beam Absorbed Current (EBAC)/Resistive Contrast Imaging (RCI)
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        


=================================================================================

 

Electron Beam Absorbed Current (EBAC), also called Resistive Contrast Imaging (RCI), is based on a similar principle as Electron Beam Induced Current (EBIC). In this technique, the electron beam of SEM injects charges which is then absorbed by metal lines under the surface. Therefore, a current is induced and measured by a probe placed on the SEM sample. In this case, the probed signal is overlaid on the secondary electron image so that direct localization of the failure becomes possible. Note that EBAC is especially used to locate failures in metallization networks inside semiconductor devices.

 

 

 

 

 

 

 

 

=================================================================================