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Chemical Properties of Silicides
- Practical Electron Microscopy and Database -
- An Online Book - |
| Microanalysis | EM Book http://www.globalsino.com/EM/ |
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| ================================================================================= |
Table 2036_e. Chemical Properties of Silicides.
Silicides |
Sintering
temp
(°C) |
Bonding energy (eV) |
Lowest temperature at which Al interacts with silicide
(°C) |
Maximum solubility of metal on Si
[cm-3] |
Etch rate in (10:1) BHF (Å/min) |
Dry etching in plasma |
Dry etching in RSE |
Selective etchant |
Oxidation rate/oxidation
stability |
Oxidation stability of silicide on silicon |
Oxidation stability of silicide on oxide |
Stability of the metal oxide |
Chemical resistance |
Molecular weight |
| Ag |
|
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High/poor |
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| Au |
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Good |
|
| Ce |
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High/poor |
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| Co |
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Good |
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Co2Si |
300-500 |
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CoSi |
400-600 |
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450-800 |
|
400 |
3x1016 |
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HCl/H2O2 |
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CoSi/Co2Si |
350, 500 |
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Cr3Si |
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CrSi2 (C11b) |
450 |
0.15 |
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CrSi2 (C40) |
|
0.05 |
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| Cu |
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High/poor |
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Cu3Si |
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2x1018 |
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| Dy |
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High/poor |
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| Er |
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High/poor |
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| Eu |
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High/poor |
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| Fe |
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High/poor |
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α-FeSi2 |
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β-FeSi2 |
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| Gd |
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High/poor |
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HfSi |
550 |
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| Ho |
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High/poor |
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IrSi |
300 |
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| La |
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High/poor |
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| Lu |
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High/poor |
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| Mg |
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High/poor |
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MnSi |
400 |
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MnSi2-x |
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MnSi2 |
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2x1015 |
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Mn11Si19 |
800 |
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| Mo |
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High/poor |
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Mo5Si3 |
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MoSi2 (C11b) |
1000 |
0.20 |
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Small |
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Good |
Poor |
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MoSi2 (C40) |
|
0.12 |
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Yes |
Yes |
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Good |
Poor |
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800-1000 |
|
500 |
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NH4OH/H2O2 |
|
Good |
Poor |
Poor,
vaporizes |
Very good |
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| Nb |
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High/poor |
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Nb/Nb5Si3 |
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Nb5Si3 (D8b) |
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NbSi2 |
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NbSi2 (C11b) |
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0.18 |
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NbSi3 |
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| Nd |
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High/poor |
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| Ni |
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Good |
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Ni2Si |
200 |
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NiSi |
400-600 |
|
350 |
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NiSi2 |
600-800 |
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7x1017 |
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| Pd |
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Good |
|
Pd2Si |
200 - 400 |
|
300 |
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KI/I2 |
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Medium (soluble in HNO3 and HF+HNO3) |
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| Pm |
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High/poor |
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| Pr |
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High/poor |
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| Pt |
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Good |
|
PtSi |
250-500 |
|
250-300 |
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aqua regia |
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Very good |
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| Re |
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High/poor |
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ReSi2 (C11b) |
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RhSi |
300 |
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| Sc |
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High/poor |
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| Sm |
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High/poor |
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| Ta |
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High/poor |
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Good |
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Ta5Si3 (C40) |
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Ta5Si3 |
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750 - 1000 |
|
500 |
|
100-300 |
Yes |
Yes |
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Good |
Fair |
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Good |
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| Tb |
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High/poor |
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| Ti |
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Good |
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Ti5Si3 (D8m) |
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Ti5Si3 |
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Ti/Ti5Si3 |
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TiSi2 (C49) |
500-700 |
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>2000 |
Yes |
Yes |
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Good |
Good |
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700-900 |
|
450-600 |
|
>2000 |
Yes |
Yes |
NH4OH/H2O2 |
|
Good |
Good |
|
Poor (soluble in dilute HF) |
|
| Tm |
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High/poor |
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V3Si |
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VSi2 (C11b) |
|
0.17 |
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VSi2(C40) |
|
0.074 |
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| W |
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High/poor |
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Poor,
vaporizes |
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W5Si3 |
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WSi2 (C40) |
|
0.22 |
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Yes |
Yes |
|
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Good |
Poor |
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240.01 |
|
650 - 1000 |
0.21 |
500 |
|
Small |
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K3Fe(CN)6/KOH |
|
Good |
Poor |
|
Very good |
240.01 |
| Y |
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High/poor |
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| Yb |
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High/poor |
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ZrSi2 |
600 |
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| ================================================================================= |
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