Chromatic Aberration Correction in SEM
- Practical Electron Microscopy and Database -
- An Online Book -

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Combined magnetic and electrostatic quadrupoles can create negative chromatic aberration and octupoles generate aperture aberrations in correcting both spherical and chromatic aberrations for a resolution limit of 1 nm at low accelerating voltages between 0.5 and 1 keV for SEM [1].

 

[1] Zach, J. and Haider, M., 1995. Aberration correction in a low voltage SEM by a multipole corrector, Nucl. Instrum. Methods Phys. Res., A363, 316–325.

 

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