Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Chromatic Aberration Correction in SEM

Combined magnetic and electrostatic quadrupoles can create negative chromatic aberration and octupoles generate aperture aberrations in correcting both spherical and chromatic aberrations for a resolution limit of 1 nm at low accelerating voltages between 0.5 and 1 keV for SEM [1].   [1] Zach, J. and Haider, M., 1995. Aberration correction in a low voltage SEM by a multipole corrector, Nucl. Instrum. Methods Phys. Res., A363, 316–325.