Advantages of EMs with Aberration Correctors
- Practical Electron Microscopy and Database -
- An Online Book -

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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.

 

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High voltage TEMs have been widely used in all the scientific and industrial fields because they reduce spherical and chromatic aberration effects of the imaging lenses, but further development of aberration correctors can allow even atomic resolution at 60 kV and lower voltages [1]. By employing an aberration corrector consisting of electrostatic and magnetic quadrupoles and octupoles, an actual reduction of the spatial resolution limit by a factor of approximately three was first achieved by Zach and Haider [2] in an LVSEM (low voltage scanning electron microscope) in 1995. However, it had not been able to use this type of correctors for imaging extended object areas in TEMs due to the large field (off-axial) aberrations of the corrector.

The attainable STEM resolution has improved by about 2.5 × and the current available in a given small probe has increased by about 10 ×.

 

 

[1] O. L. Krivanek, N. Dellby, R. J. Keyse, M. F. Murfitt, C. S. Own, Z. S. Szilagyi,in: P. W. Hawkes (Ed.), Advances in Imaging and Electron Physics, Elsevier, Amsterdam, 2008.
[2] Zach J. and Haider M., Nucl. Instrum. Methods., Phys. Res. A 363, 316 (1995).

 

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