Using some X-ray techniques listed in Table 4687a, we can not only quickly determine what chemical elements are in the area of the specimen interacting with the incident electron beam but also quantify the amount of each element in quite a straightforward way.
Table 4687a. X-ray techniques.
Abbreviation |
Full name |
EDS |
Energy-dispersive X-ray spectroscopy |
WDS |
Wavelength Dispersive (X-Ray) Spectroscopy |
HIXE |
Hydrogen/helium induced X-ray emission |
PIXE |
Particle induced X-ray emission |
PIXE |
Proton-induced x-ray emission |
XRD |
X-ray diffraction |
XPD |
X-ray photoelectron diffraction |
XPS |
X-ray photoelectron spectroscopy |
XES |
X-ray emission spectroscopy |
XAS |
X-ray absorption spectroscopy |
RIXS |
Resonant inelastic X-ray scattering |
WD-TXRF |
Vapor phase decomposition total X-ray fluorescence |
|
XRF |
X-Ray fluorescence spectroscopy |
TXRF |
Total reflection X-ray fluorescence |
TRXFR |
Total reflection X-ray fluorescence |
XFS |
X-Ray fluorescence spectroscopy |
|
XRD |
X-ray spectrometry |
GIXD/GIXRD |
Grazing incidence X-ray diffraction |
|
EXAFS |
Extended X-ray absorption fine structure |
SEXAFS |
Surface-extended X-ray absorption fine structure |
NEXAFS |
Near-edge X-ray absorption fine structure |
XANES |
X-ray absorption near-edge structure |
XAFS |
X-ray absorption fine structure |
Table 4687b lists some typical fields which EDS are applied to and the problems of their EDS measurements.