Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Relation of Kinetic Energies of Secondary Electrons in Vacuum and Specimen

In the SEM specimen, SE (secondary electron) kinetic energy in the specimen (Es) is given with respect to the bottom of the conduction band and SE kinetic energy into the vacuum (Ek) [1],
             Es = Ek + EF + Φ (for metals) ------------------------------------[4831a]
where EF -- Fermi energy
          Φ -- work function
         or Es = Ek + χ (for semiconductors and insulators) ---------------- [4831b]
where χ is electron affinity.

For metals, EF + Φ ≈ 10 eV and Ek ≈ 2.5 eV
For a semiconductor, Ek ≈ 2 eV and χ ≈ 5 eV
for an insulator, Ek ≈ 1 eV and χ = 1eV.

The moving electrons in the specimen and vacuum obey the refraction relation between their kinetic energies at the interface. Normally, the secondary electrons (SEs) have energies of less than 50 eV. 90% of secondary electrons have energies less than 10 eV and most SEs are in the energy range from 2 to 5 eV.

 

 

 

 

[1] Henke, B.L., Liesegang, J. & Smith, S.D. (1979) Soft X-ray induced secondary electron emission from semiconductors and insulators. Phys. Rev. B, 19, 3004–3021.