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Vacuum Systems, Gauges, and Applications
- Practical Electron Microscopy and Database -
- An Online Book - |
| Microanalysis | EM Book https://www.globalsino.com/EM/ |
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| This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers. |
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In general, the vacuum systems of standard EMs are composed of mechanical pump(s) (rotary pumps, rough pumps, or forepumps), diffusion pump(s), vacuum gauges, switching valves, and a network of connecting pipes.
Table 2351. Typical working pressure ranges and accuracies of various vacuum gauges.
Ultra-high vacuum
(<10-7 mbar or <10-5 Pa) |
High vacuum
(10-7-10-3 mbar or 10-5-10-1 Pa) |
Medium vacuum
(10-3 - 1 mbar or 10-1 - 101 Pa) |
Rough vacuum
(1-103 mbar or 101-105 Pa) |
Accuracy |
| 10-13 mbar |
10-11 mbar |
10-9 mbar |
10-8 mbar |
10-7 mbar |
10-6 mbar |
10-5 mbar |
10-4 mbar |
10-3 mbar |
10-2 mbar |
10-1 mbar |
1 mbar |
102 mbar |
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| Gauges |
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Active strain gauge
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Active thermocouple gauge |
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Liquid level manometer |
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Capacitance diaphragm (CDG) |
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±0.02 to 0.2% |
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Elastic element gauge |
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Compression gauge |
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Pressure balance |
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Viscosity gauge (spinning rotor) |
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±1 to 10% |
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Thermal conductivity gauge (Pirani) |
±5% |
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Thermomolecular gauge |
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Radioactive ionization gauge |
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Penning gauge |
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Cold-cathode magnetron gauge |
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Cold-cathode inverted magnetron gauge |
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High-frequency vacuum test |
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Hot-cathode ionization gauge (HCIG) |
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±1% |
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High-pressure ionization gauge |
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Bayard-alpert gauge |
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Modulator gauge |
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Suppressor gauge |
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Extractor gauge |
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Bent beam gauge |
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Hot-cathode magnetron gauge |
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| Pressure ranges |
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Piston pump |
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Diaphram pump |
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Liquid-ring pump |
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Sliding vane rotary pump |
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Multiple-vane rotary pump |
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Rotary piston pump
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Rotary plunger pump |
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Roots pump |
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Turbine pump |
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Gaseous-ring pump
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Turbomolecular pump |
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Liquid jet pump
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Vapor jet pump
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Diffusion pump |
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Diffusion ejector pump |
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Absorption pump |
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Sublimation pump |
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Sputter-ion pump |
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Cryopump |
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| Applications |
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Vacuum deposition/evaporation (a type of PVD processes) |
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PECVD |
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Gun
in TEMs |
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Specimen
chamber in TEMs |
TEM chamber & camera |
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SEM |
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| ================================================================================= |
| The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page. |
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