Based on Theory on Inelastic Mean Free Path (IMFP) of Electrons, the electron
mean free paths are well known in two energy regimes: at high energies, where they
are predicted either with Bethe(like) equations or with the more accurate optical models
based on the freeelectrongas approximation, and at very low energies, where they
are calculated either with experimental data on electron lifetimes or with firstprinciples calculations.
Figure 4809a. Electron mean free path of some elements at different kinetic energies.
Figure 4809b. Mean free paths at different kinetic energies up to 2000 eV, for Ag, Al, NA, PMMA, Si, and SiO_{2}.
Figure 4809c. Mean free paths at the kinetic energy range below 250 eV, for Ag, Al, GaAs, NA, PMMA, and Si.
Figure 4809d. Mean free paths at high kinetic energies for Si and SiO_{2}.
Table 4623 lists plasmon energies, fullwidthathalfmaximum of plasmon energies, plasmon mean free path, and inelastic mean free path of some common elements and compounds, as well as their crystal structure [6  11].
[1] Transmission EELS Attachment for SEM, Tao Luo and Anjam Khursheed, IEEE Transactions on Device and Materials Reliability, 6(2), 182 (2006).
[2] S. Tanuma, C. J. Powel, and D. R. Penn, Surf. Interface Anal. 17, 911 (1991).
[3] D. Fujita, M. Schleberger, and S. Tougaard, Surf. Sci. 357358, 180 (1996).
[4] W. Brilnger and W. Menz, Zeit. Phys. 184, 271 (1965).
[5] C. Lee, Y. Ikematsu and D. Shindo, Measurement of mean free paths for inelastic electron scattering of Si and SiO_{2}, Journal of Electron Microscopy, 51(3): 143148 (2002).
[6] Daniels, J., Festenberg, C. V., Raether, H., and Zeppenfeld, K. (1970) Optical constants of solids by electron spectroscopy. In Springer Tracts in Modern Physics, ed. G. Hoehler, Springer, New York, NY, Vol. 54, pp. 78–135.
[7] Colliex, C., Cosslett, V. E., Leapman, R. D., and Trebbia, P. (1976) Contribution of electron energyloss spectroscopy to the development of analytical electron microscopy. Ultramicroscopy 1, 301–315.
[8] Raether, H. (1980) Excitation of Plasmons and Interband Transitions by Electrons. Springer Tracts in Modern Physics, Springer, New York, NY, Vol. 88.
[9] Colliex, C. (1984) Electron energyloss spectroscopy in the electron microscope. In Advances in Optical and Electron Microscopy, eds. V. E. Cosslett and R. Barer, Academic, London, Vol. 9, pp. 65–177.
[10] Ahn, C. C., ed. (2004) Transmission Electron Energy Loss Spectrometry in Materials Science and the EELS Atlas, Wiley, New York, NY.
[11] Iakoubovskii, K., Mitsuishi, K., Nakayama, Y., and Furuya, K. (2008) Thickness measurements with electron energy loss spectroscopy. Microsc. Res. Tech. 71, 626–631.
[12]
B. Lesiak, A. Kosinski, A. Jablonski, L. KoÈveÂr, J. ToÂth, D. Varga, I. Cserny, M. Zagorska, I. KulszewiczBajer, G. Gergely, Determination of the inelastic mean free path of electrons in
polythiophenes using elastic peak electron spectroscopy method, Applied Surface Science 174 (2001) 7085.
