Partial Cross-Sections for Inner-Shell Ionization - Practical Electron Microscopy and Database - - An Online Book - |
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Microanalysis | EM Book http://www.globalsino.com/EM/ | ||||||||
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A partial cross-section specifies
the probability of a specific shell scattering through angles
up to a specific angle, β, and with energy losses covering an energy range, Δ,
above an ionization energy. For instance, the partial cross-section, σK(β,Δ), of K-shell, EK, can be given by, [1] For elements of low atomic number, σK(β,Δ) can be measured by EELS [1, 3-5], This approximation in Equation 954b is accurate for Δ ≥ 50 eV. [1,5] Based on Equation 954b, the Areal Density, N, namely the number of atoms per unit area of the TEM sample through the electron beam, can be obtained by, [1] In practice, σK(β,Δ) obtained by Equations 954a or 954b can be applied into Equation 954c for Areal Density, N, calculation. For large collection angles, the partial ionization cross-section, σ(β,Δ), becomes the total ionization cross-section, σ(Δ).
[1] R. F. Egerton, K-shell ionization cross-sections for use in microanalysis, 4(2), (1979) 169-179.
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